报告题目：Automated Robot-based Nanohandling

报告人：Prof. Dr.-Ing. habil. Sergej Fatikow

Division for Microrobotics and Control Engineering (AMiR)

University of Oldenburg, Germany　　

时　  间： 11月27日（周五）下午 15:00

地　  点： 5号楼14楼会议室，传感技术国家重点实验室

欢迎大家踊跃参加！

Abstract

“What I want to talk about is the problem of manipulating and controlling things on a small scale” stated Richard P. Feynman at the beginning of his visionary talk “There's Plenty of Room at the Bottom”, given on December 29th 1959 at the annual meeting of the American Physical Society at the California Institute of Technology. Today, half a century after this first insight into unlimited opportunities on the nanoscale, we still have to talk about the same issue. The problem identified by Feynmann turned out to be a very difficult one because of a lack of understanding of the underlying phenomena of the nanoworld and because of a lack of suitable nanohandling methods. The talk by Prof. Sergej Fatikow addresses the latter issue. The handling of micro- and nanoscale objects with an accuracy in the nanometer range is an important current trend in robotics. It is often referred to as nanohandling and is primarily understood as manipulation of objects, which may include their finding, grasping, moving, tracking, releasing, positioning, pushing, pulling, cutting, bending, twisting, etc. Additionally,many other technologies requiring tool/probe positioning with an accuracy in the nanometerrange are also regarded as nanohandling, e.g. material nanocharacterization methods like indentation or scratching; mechanical or electrical measurements on nanoscale objects; nanostructuring of surfaces by deposition or removal of materials, and others. Automated nanohandling is one of the key challenges of microsystem technology and nanotechnology. It will enable high-throughput manufacturing of novel products and open up new application fields.Current research activities in AMiR include, amongst others, the development of new nanohandling robots; the investigation of novel automated nanohandling strategies; the development of advanced control methods; as well as the investigation of suitable real-time sensing technologies on the nanoscale. In his talk, Prof. Fatikow introduces main approaches for handling objects on the nanoscale. He especially addresses his current work of an automated robot-based nanohandling station inside a scanning electron microscope (SEM). The latter serves as a powerful vision sensor and a work space for nanohandling robots integrated into the vacuum chamber and equipped with application-specific tools. Different research aspects of this work regarding the implementation of the main system components – the piezo-driven nanohandling robots, the control system, the vision-feedback approaches, and the force/tactile sensors – are discussed. Finally, current research projects and applications being pursued in AMiR are outlined. They include automated nanoassembly of AFM supertips inside SEM, handling and characterization of carbon nanotubes (CNT), electron beam induced deposition (EBiD) as a bonding and nanostructuring technology, automation issues in AFM-based nanohandling, characterization of biological objects by AFM/nanorobots, and others.

Prof. Dr.-Ing. habil. Sergej Fatikow studied computer science and electrical engineering at the Ufa Aviation Technical University in Russia, where he received his doctoral degree in 1988 with work on fuzzy control of complex non-linear systems. After that he worked until 1990 a lecturer at the same university. During his work in Russia he published over 30 papers and successfully applied for over 50 patents in the area of intelligent control. In 1990 he moved to the Institute for Process Control and Robotics at the University of Karlsruhe in Germany, where he worked as a postdoctoral scientific researcher and since 1994 as Head of the research group “Microrobotics and Micromechatronics”. He became in 1996 an assistant professor. In 2000 he accepted an associate professor position at the University of Kassel, Germany. A year later, he was invited to establish a new Division for Microrobotics and Control Engineering at the University of Oldenburg, Germany. Since 2001 he is a full professor in the Department of Computing Science and Head of this Division. He is also Head of Technology Cluster Automated Nanohandling at the Research Institute for Information Technology (OFFIS) in Germany. His research interests include micro- and nanorobotics, automated robot-based nanohandling in SEM, micro- and nanoassembly, AFM-based nanohandling, microactuators and microsensors, and neuro-fuzzy robot control. He is author of three books on microsystem technology, microrobotics, microassembly, and nanohandling automation, published by Springer in 1997, Teubner in 2000, and Springer in 2008. He also published since 1991 over 50 journal papers and over 160 conference papers on micro- and nanorobotics, nanohandling automation, and intelligent robot control.